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Ni-FeAlloy Tape PolyimideFilm PinpointNanomechanicalMode Scratch STO food HighAcpectRatio INSPParis light_emitting Litho LithiumNiobate PatternedSapphireSubstrat Step Trench Barium_titanate Vacuum ThermalConductivity NanoLithography BaTiO3 ShenYang CHRYSALIS_INC Sphere Austenite CVD Epoxy Phosphide MeltingPoint HiVacuum Led Deposition Chemical Vapor Deposition NCM #Materials Lateral