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NanoLithography PtfeMembrane medical CalciumHydroxyapatite molecular_beam SetpointMode PS_LDPE TiO2 atomic_steps ForceMapping heterojunctions DNAProtein light_emitting SmalScan rubber China CarbonNanotube SingleCrystal PhaseChange Switching C_AFM ScanningSpreadingResistanceMicroscopy Composition Indent Patterns Cell Indium_tin_oxide phase_change Nanopattern ShenYang OpticalWaveguide DIWafer frequency_modulation Roughness BariumTitanate